Demonstrating method, demonstrator, system and medium for cleaning robot equipment

The invention relates to the field of semiconductor production, and provides a teaching method, a teaching device, a system and a medium for cleaning robot equipment, and the method comprises the steps: S1, obtaining an initial configuration file, and initializing the configuration information of th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HE HAILONG, ZHU YUDONG, GAO LUWEI, MO HAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHICCOMMUNICATION TRANSPORTING
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