Optical sensor for measuring characteristics of consumable components in semiconductor plasma processing chamber

A semiconductor processing system includes a processing chamber configured to perform a semiconductor manufacturing process on each of a plurality of wafers. The processing chamber includes at least one consumable component, and a substrate transfer module positioned proximate the processing chamber and in communication with the processing chamber via a wafer access port. The wafer transfer module includes a wafer transfer robot configured to transfer each of the wafers between the substrate transfer module and the processing chamber through the wafer access port, and an optical diagnostic system, the optical diagnostic system includes an optical sensor configured to detect an optical signal from the at least one consumable component. The controller is configured to cause the processing chamber to perform the semiconductor manufacturing process on each respective wafer, and to cause the optical diagnostic system to detect the optical signal during a time when the processing chamber is not performing the semic