Silicon wafer production system

The invention provides a silicon wafer production system, which comprises channel separation equipment, cleaning equipment and channel combination equipment, and is characterized in that the channel separation equipment is used for conveying a plurality of silicon wafers on a first feeding conveying...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WU FEIFEI, HUANG ZHANGNAN, ZHU LIANG, ZHANG JIANGSHUI, WANG JUN, MENG XIAOSHUAI, LI FENGXIANG, XIE LONGHUI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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