Silicon wafer production system

The invention provides a silicon wafer production system, which comprises channel separation equipment, cleaning equipment and channel combination equipment, and is characterized in that the channel separation equipment is used for conveying a plurality of silicon wafers on a first feeding conveying...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WU FEIFEI, HUANG ZHANGNAN, ZHU LIANG, ZHANG JIANGSHUI, WANG JUN, MENG XIAOSHUAI, LI FENGXIANG, XIE LONGHUI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a silicon wafer production system, which comprises channel separation equipment, cleaning equipment and channel combination equipment, and is characterized in that the channel separation equipment is used for conveying a plurality of silicon wafers on a first feeding conveying device to a plurality of first discharging conveying devices in a one-to-one correspondence manner, and the cleaning equipment is used for obtaining the silicon wafers conveyed by the plurality of first discharging conveying devices; and a plurality of second feeding and conveying devices of the channel combining equipment are connected with the cleaning equipment so as to obtain the cleaned silicon wafers, and the silicon wafers on the second feeding and conveying devices can be conveyed to the second discharging and conveying device through the channel combining equipment. According to the silicon wafer production system, the plurality of silicon wafers of the first feeding and conveying devices are dispersed to