Pickling process failure constraint condition-based machine dispatching method and system

The invention discloses a machine dispatching method and system based on a pickling process failure constraint condition, and the method comprises the steps: building an optimization model, taking the minimization of the failure rate of a wafer group and the idle time of furnace tube equipment as ob...

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Hauptverfasser: FENG BAIYU, HUA PENGFEI, HUANG SHUAIJIE
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a machine dispatching method and system based on a pickling process failure constraint condition, and the method comprises the steps: building an optimization model, taking the minimization of the failure rate of a wafer group and the idle time of furnace tube equipment as objective functions, taking the pickling process failure constraint of the wafer group as a constraint condition, solving the optimization model, and carrying out the optimization of the pickling process failure constraint condition. The optimal dispatching scheme is obtained, and the efficiency and the utilization rate of semiconductor manufacturing are improved. Intelligent matching between the wafer group and the furnace tube equipment is realized according to the information such as the arrival time point of the wafer group, the pickling process finishing time point, the failure time point, the furnace tube process formula and the processing time, and the information such as the idle time, the availability, the c