Device and method for measuring reflectivity based on self-reference of area array CCD (Charge Coupled Device) sensor
The invention provides a reflectivity measurement device and method based on area array CCD sensor self-reference, and belongs to the field of optical measurement. Due to the instability of a light source, the light intensity of the light source fluctuates along with the change of environment and te...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a reflectivity measurement device and method based on area array CCD sensor self-reference, and belongs to the field of optical measurement. Due to the instability of a light source, the light intensity of the light source fluctuates along with the change of environment and temperature when the reflectivity is measured, so that the reflectivity measured by the traditional reflectivity equipment fluctuates, and the final measurement result is influenced. Light emitted from a light source is divided into two paths, one path is transmitted to the upper portion or the lower portion of an area array CCD sensor to serve as reference light intensity, the other path is transmitted to the surface of a sample, then reflected light is transmitted to the other part of the area array CCD sensor to serve as measurement light intensity, the light intensity is corrected into the measurement light intensity through fluctuation of the reference light intensity, and the measurement accuracy is improved. T |
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