Electrostatic holder, stage, and lithographic apparatus

The present invention relates to an electrostatic holder comprising a body and a clamping element attached to the body, the clamping element comprising an electrode for applying an attractive force between the clamping element and a first object to be clamped, where an outer edge of the body is configured to provide a gap between the outer edge of the body and the first object to be clamped, the gap is configured to output a fluid for reducing dust particles reaching a first object to be clamped or reaching a second object to be clamped on an opposite side of the holder. 本发明涉及一种静电保持器，包括本体和夹持元件，该夹持元件附接到本体，所述夹持元件包括电极，该电极用于在夹持元件与第一待夹持物体之间施加吸引力，其中本体的外边缘被配置为在本体的外边缘与第一待夹持物体之间提供间隙，该间隙被配置为用于输出用于减少到达第一待夹持物体或到达位于保持器的相反侧上的第二待夹持物体的灰尘颗粒的流体。