Image sensor

There is provided an image sensor including a sensor substrate, a spacer layer on the sensor substrate, and a color separation lens array on the spacer layer and configured to separate light based on a wavelength of the light, comprising a plurality of first nano-columns and a first peripheral mater...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JUNG HWI-YOUNG, KWON BYOUNG-HO, PARK CHAN-HO, KIM DONGAN, JEON MIN-HWAN, BYUN KYUNG-RAE, PARK HONG-KYU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:There is provided an image sensor including a sensor substrate, a spacer layer on the sensor substrate, and a color separation lens array on the spacer layer and configured to separate light based on a wavelength of the light, comprising a plurality of first nano-columns and a first peripheral material layer around the plurality of first nano-columns; a chemical mechanical polishing (CMP) stop layer on the first peripheral material layer; an etch stop layer on an upper surface of the CMP stop layer and directly on an upper surface of each of the plurality of first nanopillars; and a second lens layer on the etch stop layer, the second lens layer including a plurality of second nanopillars and a second peripheral material layer around the plurality of second nanopillars. 提供了一种图像传感器,其包括传感器基板、在传感器基板上的间隔物层、以及在间隔物层上并配置为基于光的波长分离光的颜色分离透镜阵列,其中颜色分离透镜阵列包括:第一透镜层,包括多个第一纳米柱和在所述多个第一纳米柱周围的第一周边材料层;化学机械抛光(CMP)停止层,在第一周边材料层上;蚀刻停止层,在CMP停止层的上表面上并直接在所述多个第一纳米柱中的每个第一纳米柱的上表面上;以及在蚀刻停止层上的第二透镜层,第二透镜层包括多个第二纳米柱和在所述多个第二纳米柱周围的第二周边材料层。