Carrying table structure facilitating mutual switching of wafers of different sizes and method thereof

The invention discloses a carrying table structure facilitating mutual switching of wafers of different sizes and a method thereof. The platform deck structure comprises an ejector pin used for supporting a wafer or a platform deck during transmission and the platform deck used for bearing the wafer...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIU PENGFEI, XU KAIDONG, CHOI HO-SAN, ZHU PENGFEI, LYU XIANFENG, FAN SIDA, SANG KANG, ZOU RONGYUAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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