Carrying table structure facilitating mutual switching of wafers of different sizes and method thereof

The invention discloses a carrying table structure facilitating mutual switching of wafers of different sizes and a method thereof. The platform deck structure comprises an ejector pin used for supporting a wafer or a platform deck during transmission and the platform deck used for bearing the wafer and a limiting ring, and the wafer limiting ring is concentrically arranged on the platform deck with the center of the platform deck as the circle center. And the inner diameter size or the outer diameter size of the wafer limiting ring is matched with the outer diameter size of a wafer to be processed. Therefore, the method can be used for quickly switching the wafer chips with different sizes. 本发明公开了一种便于不同尺寸晶圆相互切换的载台结构及其方法。载台结构包括用于传输时支撑起晶圆或者载台的顶针，以及承载晶圆和限制环的载台，所述载台上以自身的中心为圆心同心设置有一个晶圆限制环；所述晶圆限制环的内径尺寸或者外径尺寸与待加工晶圆的外径尺寸匹配。由此可见，本发明可以用于不同尺寸的晶圆芯片的快速切换。