High-precision displacement driving table

The invention discloses a high-precision displacement driving table, and relates to the technical field of precision detection instruments. According to the high-precision displacement driving table, two PZT piezoelectric ceramic motor or voice coil motor driving mechanisms are adopted as displaceme...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WU KUN, DUAN HONGWEI, GE HONGFENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a high-precision displacement driving table, and relates to the technical field of precision detection instruments. According to the high-precision displacement driving table, two PZT piezoelectric ceramic motor or voice coil motor driving mechanisms are adopted as displacement output mechanisms, displacement is output to an adjusting object through a connecting mechanism, then the actual displacement of the adjusting object is measured through a position sensor, and the actual displacement value is fed back to the PZT piezoelectric ceramic motor or voice coil motor driving mechanisms; a position closed loop is formed, and the position closed loop can obtain very small static errors and dynamic responses, so that accurate control over displacement output is achieved. A plurality of temperature sensors are used for testing the temperature of a system mounting base and the environment temperature, then the temperature of the system mounting base and the environment temperature are fed ba