Thin film transistor biochip for biochemical detection and forming method thereof

The invention relates to a thin film transistor biochip for biochemical detection and a forming method thereof. The thin film transistor biochip for biochemical detection comprises: a substrate; the signal processing structure is located on the top face of the substrate in the first direction, the s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DENG LI'ANG, LI JUN, TANG WEI, SONG YAWEN, GUO XIAOJUN, HOU XIAO, SHI RONGRONG, YIN XIAOKUAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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