Thin film transistor biochip for biochemical detection and forming method thereof

The invention relates to a thin film transistor biochip for biochemical detection and a forming method thereof. The thin film transistor biochip for biochemical detection comprises: a substrate; the signal processing structure is located on the top face of the substrate in the first direction, the s...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: DENG LI'ANG, LI JUN, TANG WEI, SONG YAWEN, GUO XIAOJUN, HOU XIAO, SHI RONGRONG, YIN XIAOKUAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention relates to a thin film transistor biochip for biochemical detection and a forming method thereof. The thin film transistor biochip for biochemical detection comprises: a substrate; the signal processing structure is located on the top face of the substrate in the first direction, the signal processing structure comprises a thin film transistor circuit, and the first direction is perpendicular to the top face of the substrate; the front-end sensor is integrated above the signal processing structure along the first direction, and the front-end sensor is electrically connected with the thin film transistor circuit; the packaging layer covers the surface of the signal processing structure, an opening is formed in the packaging layer, and the front-end sensor is located in the opening. According to the invention, high-sensitivity sensing performance is realized, and the problem that a traditional thin film transistor system cannot be directly contacted with a solution to be detected for biochemical d