Thin film transistor biochip for biochemical detection and forming method thereof
The invention relates to a thin film transistor biochip for biochemical detection and a forming method thereof. The thin film transistor biochip for biochemical detection comprises: a substrate; the signal processing structure is located on the top face of the substrate in the first direction, the s...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to a thin film transistor biochip for biochemical detection and a forming method thereof. The thin film transistor biochip for biochemical detection comprises: a substrate; the signal processing structure is located on the top face of the substrate in the first direction, the signal processing structure comprises a thin film transistor circuit, and the first direction is perpendicular to the top face of the substrate; the front-end sensor is integrated above the signal processing structure along the first direction, and the front-end sensor is electrically connected with the thin film transistor circuit; the packaging layer covers the surface of the signal processing structure, an opening is formed in the packaging layer, and the front-end sensor is located in the opening. According to the invention, high-sensitivity sensing performance is realized, and the problem that a traditional thin film transistor system cannot be directly contacted with a solution to be detected for biochemical d |
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