High-temperature high-response pressure sensor structure and preparation method thereof

The invention relates to a high-temperature high-response pressure sensor structure and a preparation method thereof. The sensor structure comprises a support and a pressure sensing assembly. The pressure sensing assembly comprises an insertion core, a transmission optical fiber and a diaphragm; the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHOU WANFENG, LIU NIANQIANG, MA TAO, ZHANG DI, WANG FEI, LI TIANCI, LIU XIANMING, MU FANGQING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a high-temperature high-response pressure sensor structure and a preparation method thereof. The sensor structure comprises a support and a pressure sensing assembly. The pressure sensing assembly comprises an insertion core, a transmission optical fiber and a diaphragm; the insertion core comprises a cylinder structure with an inner cavity; the inner cavity comprises a guide section and an optical fiber accommodating section; one end of the transmission optical fiber passes through the guide section and is packaged in the optical fiber accommodating section, and the light emitting surface of the end is flush with the end surface of one end, connected with the diaphragm, of the insertion core; the diaphragm comprises a pulsating pressure acting film and an annular cover; the other end of the annular cover is connected with the insertion core in a welding manner; a Fabry-Perot cavity is defined by the diaphragm, the light-emitting face of the transmission optical fiber and the end face