Flexible pressure sensor based on stepped micro-cone and preparation method thereof

The invention discloses a preparation method of a flexible pressure sensor based on a stepped micro-cone, and belongs to the technical field of electronic skin sensors, and the preparation method comprises the following steps: S1, copper sheet processing; s2, preparing a step type inverted micro-cone structure copper sheet; s3, preparing a PDMS elastomer with a stepped micro-cone structure; s4, preparing an Ag/Ti/PDMS conductive elastomer with a stepped micro-conical structure; and S5, preparing the stepped micro-cone structure pressure sensor. The flexible stepped micro-cone array pressure sensor is prepared through the method. According to the flexible pressure sensor based on the stepped micro-cone and the preparation method of the flexible pressure sensor, the flexible pressure sensor prepared by the method has the characteristics of flexibility, high sensitivity and wide pressure sensing range, and different types of objects can be identified by using the pressure change of the sensor. 本发明公开了一种基于台阶式微圆锥的柔