Vacuum device

The embodiment of the invention relates to a pumping device or system specially suitable for elastic fluid, in particular to a vacuum device which comprises a vacuum device body, a molecular vacuum pump, an ion vacuum pump, a mechanical vacuum pump, a vacuum cavity and a vacuum pipeline. The molecul...

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Bibliographische Detailangaben
Hauptverfasser:	DUAN TIANYING, WU SHUIJIN, LIU LINDING, YANG HONGYI, YU HUAJIN, HOU BIN, SONG DEKUAN, ZHANG CHUAN, YANG JIANWEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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Beschreibung
Zusammenfassung:	The embodiment of the invention relates to a pumping device or system specially suitable for elastic fluid, in particular to a vacuum device which comprises a vacuum device body, a molecular vacuum pump, an ion vacuum pump, a mechanical vacuum pump, a vacuum cavity and a vacuum pipeline. The molecular vacuum pump, the ion vacuum pump, the mechanical vacuum pump and the vacuum chamber are arranged in the vacuum device body, the vacuum pipeline is connected with the vacuum chamber, and the part extending out of the vacuum chamber is connected with a vacuum load; the mechanical vacuum pump pumps the vacuum chamber to a first preset vacuum degree and then stops working; the molecular vacuum pump vacuumizes the vacuum chamber to a second preset vacuum degree and then stops working; the ion vacuum pump pumps the vacuum chamber to a third preset vacuum degree, and in the three, the first preset vacuum degree is lower than the second preset vacuum degree and lower than the third preset vacuum degree. According to the