Three-dimensional compensation method for absolute pressure, differential pressure and temperature

The invention provides an absolute pressure, differential pressure and temperature three-dimensional compensation method, which comprises the steps that a pressure sensing module is placed in an incubator, an absolute pressure gas circuit and a differential pressure gas circuit of the pressure sensi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHU XIAO, SHANG KEJUN, ZU JIANJING, NIU GUANGXING, BAI NAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides an absolute pressure, differential pressure and temperature three-dimensional compensation method, which comprises the steps that a pressure sensing module is placed in an incubator, an absolute pressure gas circuit and a differential pressure gas circuit of the pressure sensing module are respectively connected with an absolute pressure control channel and a differential pressure control channel of a standard pressure controller, and the differential pressure channel takes the pressure of the absolute pressure channel as a reference; completing data test under all absolute pressure test pressure points and differential pressure test pressure points under each test temperature point; curved surface fitting modeling is carried out based on absolute pressure data and temperature data of the absolute pressure sensor and differential pressure data, temperature data and absolute pressure reference data of the differential pressure sensor, and a fitted absolute pressure calculation model and