Calibration method, calibration device and calibration system

The invention discloses a calibration method, a calibration device and a calibration system, which are used for calibrating a calibration position coordinate of a center point of an actuator mounted on a manipulator under a flange coordinate system of the manipulator, and the method comprises the following steps: acquiring a calibration posture of the manipulator when a contact probe of a contact detection device is in contact with each contact of a target plane, the contact detection device is arranged on the flange, the position of the contact probe coincides with the center point of the actuator, and the contact detection device is used for sending out prompt information when the contact probe makes contact with the target plane. According to the calibration postures corresponding to the contacts, the pose conversion relation between the manipulator coordinate system and the flange coordinate system corresponding to the calibration postures is calculated; and according to the pose conversion relationship c