Suction head of air floating chip mounter

The invention discloses a suction head of an air floating chip mounter, and relates to the technical field of semiconductor processing and microelectronic component manufacturing. The air bearing is of a cylindrical structure, the thrust plate is an annular plate and is fixed to the bottom end of the air bearing, the rotary motor is rotationally installed at the top end of the air bearing, the pneumatic Z shaft is rotationally installed at the bottom end of the air bearing and is in transmission connection with the rotary motor, the bottom end of the pneumatic Z shaft is provided with a square groove and extends out of the thrust plate, and an air inlet channel is formed in the center of the rotary motor and the center of the pneumatic Z shaft in a penetrating mode. The suction head and the bottom end of the square air cylinder are connected into a whole, the two sides of the suction head are connected with the two sides of the bottom end of the pneumatic Z shaft through pre-tightening springs, an air suction