MEMS resonator

The invention discloses an MEMS resonator, which comprises a vibration arm and an electrode group, a first sawtooth part and a second sawtooth part with uniform gaps are arranged between the vibration arm and the electrode group, the first sawtooth part comprises first teeth connected with the vibration arm, the second sawtooth part comprises second teeth connected with the electrode group, the first teeth and the second teeth are arranged in a staggered manner along a first axis direction, and the first teeth and the second teeth are arranged in a staggered manner along a second axis direction. Each of the first tooth and the second tooth comprises a first surface, a second surface and a third surface, the first surface is parallel to the direction of the first axis, an included angle is formed between the second surface and/or the third surface and the direction of the third axis, and the static vibration arm is parallel to the first axis. The vibrating arm swings relative to the electrode group around a se