Multispectral short-wave infrared detector based on GaSb photonic crystal plate
The invention provides a multispectral short-wave infrared detector based on a GaSb photonic crystal plate. The multispectral short-wave infrared detector based on the GaSb photonic crystal plate comprises a second-class superlattice PBIN detection unit and the GaSb photonic crystal plate integrated...
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Zusammenfassung: | The invention provides a multispectral short-wave infrared detector based on a GaSb photonic crystal plate. The multispectral short-wave infrared detector based on the GaSb photonic crystal plate comprises a second-class superlattice PBIN detection unit and the GaSb photonic crystal plate integrated on a GaSb cover layer of the second-class superlattice PBIN detection unit. The GaSb photonic crystal plate comprises a plurality of crystal plate units, and the periods and lattice constants of the plurality of crystal plate units are different; each crystal plate unit is provided with a plurality of probe holes, and the sizes of the probe holes of the plurality of crystal plate units are different. The invention has the advantages of wavelength selectivity, spectrum diversity, high resolution and wide working wave band.
本发明提供了一种基于GaSb光子晶体板的多光谱短波红外探测器,包括二类超晶格PBIN探测单元,以及在二类超晶格PBIN探测单元的GaSb盖层上集成的GaSb光子晶体板;GaSb光子晶体板包括多个晶体板单元,并且多个晶体板单元的周期不同、晶格常数不同;每一个晶体板单元开设多个探测孔,多个晶体板单元的探测孔的孔尺寸不同。本发明具有波长选择性、光谱多样性、高分辨率、工作波段广泛的优势。 |
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