Method for programming EFEM robot and automatic teaching element thereof
Embodiments of the present invention relate to a method of automatically reprogramming an EFEM to address a change in position of an EFEM robot. In some embodiments, the method is implemented by determining an initial position of an EFEM robot within the EFEM. The EFEM robot at the initial position...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | Embodiments of the present invention relate to a method of automatically reprogramming an EFEM to address a change in position of an EFEM robot. In some embodiments, the method is implemented by determining an initial position of an EFEM robot within the EFEM. The EFEM robot at the initial position moves along a first plurality of steps, where the first plurality of steps is defined relative to the initial position and extends along a path between the first position and the second position. A position parameter is determined, where the position parameter describes a change between an initial position of the EFEM robot and a new position different from the initial position. A second plurality of steps is determined based on the position parameter. The EFEM robot at the new position moves along a second plurality of steps, where the second plurality of steps is defined relative to the new position and extends along a path between the first position and the second position. The embodiment of the invention also r |
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