Vacuum system of magnetron sputtering coating equipment

The invention discloses a vacuum system of magnetron sputtering coating equipment, which comprises a vacuum chamber, a vacuumizing device is arranged on the vacuum chamber, and a sealing valve device is arranged at the inlet of the vacuum chamber; the sealing valve device comprises a door body and a negative pressure device, a circle of sealing groove is formed in the side, located at the inlet, of the door body in the circumferential direction, a hollow cavity is formed in the door body and communicated with the sealing groove through an air hole, and the negative pressure device is communicated with the hollow cavity through a pipeline. The door body of the sealing valve device covers the inlet, the negative pressure device pumps away air in the sealing groove, the door body is pressed at the inlet of the vacuum chamber, and then the vacuumizing device pumps away air in the vacuum chamber to form vacuum, so that air overflowing around the door body is reduced, the sealing effect at the inlet of the vacuum c