Purification method of electronic-grade chlorine trifluoride

The invention relates to the technical field of intelligent purification, and particularly discloses an electronic-grade chlorine trifluoride purification method which comprises the following steps: carrying out moisture removal, oxide removal and impurity removal treatment on industrial-grade chlorine trifluoride in a pretreatment system to obtain pretreated chlorine trifluoride; the pretreated chlorine trifluoride is subjected to fractionation separation through a fractionating tower to obtain high-purity chlorine trifluoride, and the high-purity chlorine trifluoride passes through an adsorption system to remove trace moisture, oxides and organic impurities to obtain purified electronic-grade chlorine trifluoride; wherein when the high-purity chlorine trifluoride passes through an adsorption system to remove trace moisture, oxides and organic impurities to obtain purified electronic-grade chlorine trifluoride, the saturation state of an adsorbent is monitored through an artificial intelligence technology, s