Exhaust pressure balancing device for furnace tube process pipeline

The invention discloses a furnace tube process pipeline exhaust pressure balancing device which comprises a furnace tube shell, an air inlet pipeline and an exhaust pipeline are arranged in the furnace tube shell, the exhaust pipeline is divided into a first-section pipeline and a second-section pipeline, a pressure sensor is arranged on the inner wall of the second-section pipeline, and pressure balancers are arranged on the upper side and the lower side of the second-section pipeline. The pressure balancer comprises an auxiliary pipeline, control valves are arranged at the two ends of the auxiliary pipeline, and a negative pressure pump is arranged in the auxiliary pipeline. The gas pressure in the exhaust pipeline is adjusted through the pressure balancer, different pressures of process gas in the exhaust pipeline are avoided, the uniformity of the thickness of a film formed on the surface of a wafer is guaranteed, and the product quality is guaranteed. 本发明公开了一种炉管工艺管路排气压力平衡装置，包括炉管壳体，所述炉管壳体内设有进气管路、排气管路，所述排气