CrAlO composite target material as well as preparation method and application thereof
The invention relates to the technical field of powder metallurgy materials, and particularly discloses a CrAlO composite target material and a preparation method and application thereof. The CrAlO composite target material is of a double-layer structure, a CrAlO alloy target material serves as a ta...
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| creator | YAO WEI ZHANG FENGGE WEI TIEFENG ZHANG QIANNAN YUE WANXIANG |
| description | The invention relates to the technical field of powder metallurgy materials, and particularly discloses a CrAlO composite target material and a preparation method and application thereof. The CrAlO composite target material is of a double-layer structure, a CrAlO alloy target material serves as a target material upper layer, and stainless steel serves as a target material bottom layer; the CrAlO alloy target material is prepared from the following components in atomic percent: 50 to 95 at% of Cr and 5 to 50 at% of alpha-Al2O3. The invention further discloses a preparation method and application of the CrAlO composite target material. By means of the technical scheme, the CrAlO alloy target material high in compactness, low in impurity element content and high in bending strength can be obtained, and the target material is uniform in structure, free of segregation and good in film layer performance.
本申请涉及粉末冶金材料的技术领域，具体公开了一种CrAlO复合靶材及其制备方法和应用。本申请公开的CrAlO复合靶材为双层结构，以CrAlO合金靶材为靶材上层，以不锈钢为靶材底层；所述CrAlO合金靶材按原子百分比由以下成分 |
| format | Patent |
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本申请涉及粉末冶金材料的技术领域，具体公开了一种CrAlO复合靶材及其制备方法和应用。本申请公开的CrAlO复合靶材为双层结构，以CrAlO合金靶材为靶材上层，以不锈钢为靶材底层；所述CrAlO合金靶材按原子百分比由以下成分</description><language>chi ; eng</language><subject>ALLOYS ; CASTING ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; FERROUS OR NON-FERROUS ALLOYS ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; MAKING METALLIC POWDER ; MANUFACTURE OF ARTICLES FROM METALLIC POWDER ; METALLURGY ; PERFORMING OPERATIONS ; POWDER METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION ; TRANSPORTING ; TREATMENT OF ALLOYS OR NON-FERROUS METALS ; WORKING METALLIC POWDER</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240319&DB=EPODOC&CC=CN&NR=117721425A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240319&DB=EPODOC&CC=CN&NR=117721425A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YAO WEI</creatorcontrib><creatorcontrib>ZHANG FENGGE</creatorcontrib><creatorcontrib>WEI TIEFENG</creatorcontrib><creatorcontrib>ZHANG QIANNAN</creatorcontrib><creatorcontrib>YUE WANXIANG</creatorcontrib><title>CrAlO composite target material as well as preparation method and application thereof</title><description>The invention relates to the technical field of powder metallurgy materials, and particularly discloses a CrAlO composite target material and a preparation method and application thereof. The CrAlO composite target material is of a double-layer structure, a CrAlO alloy target material serves as a target material upper layer, and stainless steel serves as a target material bottom layer; the CrAlO alloy target material is prepared from the following components in atomic percent: 50 to 95 at% of Cr and 5 to 50 at% of alpha-Al2O3. The invention further discloses a preparation method and application of the CrAlO composite target material. By means of the technical scheme, the CrAlO alloy target material high in compactness, low in impurity element content and high in bending strength can be obtained, and the target material is uniform in structure, free of segregation and good in film layer performance.
本申请涉及粉末冶金材料的技术领域，具体公开了一种CrAlO复合靶材及其制备方法和应用。本申请公开的CrAlO复合靶材为双层结构，以CrAlO合金靶材为靶材上层，以不锈钢为靶材底层；所述CrAlO合金靶材按原子百分比由以下成分</description><subject>ALLOYS</subject><subject>CASTING</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>FERROUS OR NON-FERROUS ALLOYS</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>MAKING METALLIC POWDER</subject><subject>MANUFACTURE OF ARTICLES FROM METALLIC POWDER</subject><subject>METALLURGY</subject><subject>PERFORMING OPERATIONS</subject><subject>POWDER METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><subject>TRANSPORTING</subject><subject>TREATMENT OF ALLOYS OR NON-FERROUS METALS</subject><subject>WORKING METALLIC POWDER</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNirEKAjEQBdNYiPoP6wdY5FSuPoJipY3WxxLfeYFcsiQL_r6ifoDFMDDM3Nxc6eKFfJ4k16Ag5fKA0sSKEjgSV3oifiwFwoU15EQTdMx34vRGJAb_zTqiIA9LMxs4Vqx-Xpj18XB1pw0k96jCHgnau7O1bdvYXbPvtv88L8qWOSg</recordid><startdate>20240319</startdate><enddate>20240319</enddate><creator>YAO WEI</creator><creator>ZHANG FENGGE</creator><creator>WEI TIEFENG</creator><creator>ZHANG QIANNAN</creator><creator>YUE WANXIANG</creator><scope>EVB</scope></search><sort><creationdate>20240319</creationdate><title>CrAlO composite target material as well as preparation method and application thereof</title><author>YAO WEI ; ZHANG FENGGE ; WEI TIEFENG ; ZHANG QIANNAN ; YUE WANXIANG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN117721425A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2024</creationdate><topic>ALLOYS</topic><topic>CASTING</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>FERROUS OR NON-FERROUS ALLOYS</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>MAKING METALLIC POWDER</topic><topic>MANUFACTURE OF ARTICLES FROM METALLIC POWDER</topic><topic>METALLURGY</topic><topic>PERFORMING OPERATIONS</topic><topic>POWDER METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><topic>TRANSPORTING</topic><topic>TREATMENT OF ALLOYS OR NON-FERROUS METALS</topic><topic>WORKING METALLIC POWDER</topic><toplevel>online_resources</toplevel><creatorcontrib>YAO WEI</creatorcontrib><creatorcontrib>ZHANG FENGGE</creatorcontrib><creatorcontrib>WEI TIEFENG</creatorcontrib><creatorcontrib>ZHANG QIANNAN</creatorcontrib><creatorcontrib>YUE WANXIANG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>YAO WEI</au><au>ZHANG FENGGE</au><au>WEI TIEFENG</au><au>ZHANG QIANNAN</au><au>YUE WANXIANG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>CrAlO composite target material as well as preparation method and application thereof</title><date>2024-03-19</date><risdate>2024</risdate><abstract>The invention relates to the technical field of powder metallurgy materials, and particularly discloses a CrAlO composite target material and a preparation method and application thereof. The CrAlO composite target material is of a double-layer structure, a CrAlO alloy target material serves as a target material upper layer, and stainless steel serves as a target material bottom layer; the CrAlO alloy target material is prepared from the following components in atomic percent: 50 to 95 at% of Cr and 5 to 50 at% of alpha-Al2O3. The invention further discloses a preparation method and application of the CrAlO composite target material. By means of the technical scheme, the CrAlO alloy target material high in compactness, low in impurity element content and high in bending strength can be obtained, and the target material is uniform in structure, free of segregation and good in film layer performance.
本申请涉及粉末冶金材料的技术领域，具体公开了一种CrAlO复合靶材及其制备方法和应用。本申请公开的CrAlO复合靶材为双层结构，以CrAlO合金靶材为靶材上层，以不锈钢为靶材底层；所述CrAlO合金靶材按原子百分比由以下成分</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | ALLOYS CASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL FERROUS OR NON-FERROUS ALLOYS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MAKING METALLIC POWDER MANUFACTURE OF ARTICLES FROM METALLIC POWDER METALLURGY PERFORMING OPERATIONS POWDER METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING TREATMENT OF ALLOYS OR NON-FERROUS METALS WORKING METALLIC POWDER |
| title | CrAlO composite target material as well as preparation method and application thereof |
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