CrAlO composite target material as well as preparation method and application thereof

The invention relates to the technical field of powder metallurgy materials, and particularly discloses a CrAlO composite target material and a preparation method and application thereof. The CrAlO composite target material is of a double-layer structure, a CrAlO alloy target material serves as a target material upper layer, and stainless steel serves as a target material bottom layer; the CrAlO alloy target material is prepared from the following components in atomic percent: 50 to 95 at% of Cr and 5 to 50 at% of alpha-Al2O3. The invention further discloses a preparation method and application of the CrAlO composite target material. By means of the technical scheme, the CrAlO alloy target material high in compactness, low in impurity element content and high in bending strength can be obtained, and the target material is uniform in structure, free of segregation and good in film layer performance. 本申请涉及粉末冶金材料的技术领域，具体公开了一种CrAlO复合靶材及其制备方法和应用。本申请公开的CrAlO复合靶材为双层结构，以CrAlO合金靶材为靶材上层，以不锈钢为靶材底层；所述CrAlO合金靶材按原子百分比由以下成分