Gas tank assembly for high-pressure treatment device

The present invention provides a gas tank assembly for a high-pressure treatment device, comprising: a housing having an internal space; a supply module configured so as to be disposed in the internal space, the supply module supplying a process gas to a chamber of the high-pressure processing appar...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YOON HYE-SUNG, LIN GENRONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR BASIC ELECTRIC ELEMENTS CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS SEMICONDUCTOR DEVICES STORING TRANSPORTING
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