Brush movement device of semiconductor cleaning equipment and semiconductor cleaning equipment
The invention relates to a brush movement device of semiconductor cleaning equipment and the semiconductor cleaning equipment. The brush movement device of the semiconductor cleaning equipment is in driving connection with a main shaft through four guide bearings and arranged around the main shaft a...
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| creator | QIN ZHENJIANG SUN JIAN WANG HUI ZHU GUOHUI |
| description | The invention relates to a brush movement device of semiconductor cleaning equipment and the semiconductor cleaning equipment. The brush movement device of the semiconductor cleaning equipment is in driving connection with a main shaft through four guide bearings and arranged around the main shaft at equal included angles, and the four guide bearings are suitable for driving the main shaft to rotate when rotating; the rotary driving unit is connected with the bearing assembly through the transmission assembly, and the rotary driving unit is used for driving the bearing assembly to rotate through the transmission assembly, so that the four guide bearings drive the main shaft to rotate; the bearing assembly is arranged on the fixing frame; the fixing frame is fixed on the bottom mounting plate; the bottom mounting plate and the rotary driving unit are both connected with the supporting frame; and the lifting driving unit is used for driving the supporting frame to ascend and descend, so that the bottom mounting |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN117718255A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN117718255A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN117718255A3</originalsourceid><addsrcrecordid>eNrjZIhzKiotzlDIzS9LzU3NK1FISS3LTE5VyE9TKE7NzUzOz0spTS7JL1JIzklNzMvMS1dILSzNLAArTcxLIaiIh4E1LTGnOJUXSnMzKLq5hjh76KYW5MenFhckJqfmpZbEO_sZGpqbG1oYmZo6GhOjBgC7KD2m</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Brush movement device of semiconductor cleaning equipment and semiconductor cleaning equipment</title><source>esp@cenet</source><creator>QIN ZHENJIANG ; SUN JIAN ; WANG HUI ; ZHU GUOHUI</creator><creatorcontrib>QIN ZHENJIANG ; SUN JIAN ; WANG HUI ; ZHU GUOHUI</creatorcontrib><description>The invention relates to a brush movement device of semiconductor cleaning equipment and the semiconductor cleaning equipment. The brush movement device of the semiconductor cleaning equipment is in driving connection with a main shaft through four guide bearings and arranged around the main shaft at equal included angles, and the four guide bearings are suitable for driving the main shaft to rotate when rotating; the rotary driving unit is connected with the bearing assembly through the transmission assembly, and the rotary driving unit is used for driving the bearing assembly to rotate through the transmission assembly, so that the four guide bearings drive the main shaft to rotate; the bearing assembly is arranged on the fixing frame; the fixing frame is fixed on the bottom mounting plate; the bottom mounting plate and the rotary driving unit are both connected with the supporting frame; and the lifting driving unit is used for driving the supporting frame to ascend and descend, so that the bottom mounting</description><language>chi ; eng</language><subject>BASIC ELECTRIC ELEMENTS ; CLEANING ; CLEANING IN GENERAL ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; PERFORMING OPERATIONS ; PREVENTION OF FOULING IN GENERAL ; SEMICONDUCTOR DEVICES ; TRANSPORTING</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240319&DB=EPODOC&CC=CN&NR=117718255A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240319&DB=EPODOC&CC=CN&NR=117718255A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>QIN ZHENJIANG</creatorcontrib><creatorcontrib>SUN JIAN</creatorcontrib><creatorcontrib>WANG HUI</creatorcontrib><creatorcontrib>ZHU GUOHUI</creatorcontrib><title>Brush movement device of semiconductor cleaning equipment and semiconductor cleaning equipment</title><description>The invention relates to a brush movement device of semiconductor cleaning equipment and the semiconductor cleaning equipment. The brush movement device of the semiconductor cleaning equipment is in driving connection with a main shaft through four guide bearings and arranged around the main shaft at equal included angles, and the four guide bearings are suitable for driving the main shaft to rotate when rotating; the rotary driving unit is connected with the bearing assembly through the transmission assembly, and the rotary driving unit is used for driving the bearing assembly to rotate through the transmission assembly, so that the four guide bearings drive the main shaft to rotate; the bearing assembly is arranged on the fixing frame; the fixing frame is fixed on the bottom mounting plate; the bottom mounting plate and the rotary driving unit are both connected with the supporting frame; and the lifting driving unit is used for driving the supporting frame to ascend and descend, so that the bottom mounting</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CLEANING</subject><subject>CLEANING IN GENERAL</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>PERFORMING OPERATIONS</subject><subject>PREVENTION OF FOULING IN GENERAL</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZIhzKiotzlDIzS9LzU3NK1FISS3LTE5VyE9TKE7NzUzOz0spTS7JL1JIzklNzMvMS1dILSzNLAArTcxLIaiIh4E1LTGnOJUXSnMzKLq5hjh76KYW5MenFhckJqfmpZbEO_sZGpqbG1oYmZo6GhOjBgC7KD2m</recordid><startdate>20240319</startdate><enddate>20240319</enddate><creator>QIN ZHENJIANG</creator><creator>SUN JIAN</creator><creator>WANG HUI</creator><creator>ZHU GUOHUI</creator><scope>EVB</scope></search><sort><creationdate>20240319</creationdate><title>Brush movement device of semiconductor cleaning equipment and semiconductor cleaning equipment</title><author>QIN ZHENJIANG ; SUN JIAN ; WANG HUI ; ZHU GUOHUI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN117718255A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2024</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CLEANING</topic><topic>CLEANING IN GENERAL</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>PERFORMING OPERATIONS</topic><topic>PREVENTION OF FOULING IN GENERAL</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>QIN ZHENJIANG</creatorcontrib><creatorcontrib>SUN JIAN</creatorcontrib><creatorcontrib>WANG HUI</creatorcontrib><creatorcontrib>ZHU GUOHUI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>QIN ZHENJIANG</au><au>SUN JIAN</au><au>WANG HUI</au><au>ZHU GUOHUI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Brush movement device of semiconductor cleaning equipment and semiconductor cleaning equipment</title><date>2024-03-19</date><risdate>2024</risdate><abstract>The invention relates to a brush movement device of semiconductor cleaning equipment and the semiconductor cleaning equipment. The brush movement device of the semiconductor cleaning equipment is in driving connection with a main shaft through four guide bearings and arranged around the main shaft at equal included angles, and the four guide bearings are suitable for driving the main shaft to rotate when rotating; the rotary driving unit is connected with the bearing assembly through the transmission assembly, and the rotary driving unit is used for driving the bearing assembly to rotate through the transmission assembly, so that the four guide bearings drive the main shaft to rotate; the bearing assembly is arranged on the fixing frame; the fixing frame is fixed on the bottom mounting plate; the bottom mounting plate and the rotary driving unit are both connected with the supporting frame; and the lifting driving unit is used for driving the supporting frame to ascend and descend, so that the bottom mounting</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
| recordid | cdi_epo_espacenet_CN117718255A |
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| subjects | BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING |
| title | Brush movement device of semiconductor cleaning equipment and semiconductor cleaning equipment |
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