Brush movement device of semiconductor cleaning equipment and semiconductor cleaning equipment

The invention relates to a brush movement device of semiconductor cleaning equipment and the semiconductor cleaning equipment. The brush movement device of the semiconductor cleaning equipment is in driving connection with a main shaft through four guide bearings and arranged around the main shaft a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: QIN ZHENJIANG, SUN JIAN, WANG HUI, ZHU GUOHUI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a brush movement device of semiconductor cleaning equipment and the semiconductor cleaning equipment. The brush movement device of the semiconductor cleaning equipment is in driving connection with a main shaft through four guide bearings and arranged around the main shaft at equal included angles, and the four guide bearings are suitable for driving the main shaft to rotate when rotating; the rotary driving unit is connected with the bearing assembly through the transmission assembly, and the rotary driving unit is used for driving the bearing assembly to rotate through the transmission assembly, so that the four guide bearings drive the main shaft to rotate; the bearing assembly is arranged on the fixing frame; the fixing frame is fixed on the bottom mounting plate; the bottom mounting plate and the rotary driving unit are both connected with the supporting frame; and the lifting driving unit is used for driving the supporting frame to ascend and descend, so that the bottom mounting