Substrate scanning apparatus with swing and rotatable substrate holder

A method for scanning a substrate includes securing a substrate on a substrate holder within a processing chamber; and performing a first pass of the parallel grating pattern by synchronously driving a first rotary driver coupled to a proximal end of the swing arm and a second rotary driver coupled to a distal end of the swing arm to move the substrate relative to a processing apparatus focused on the local spot on the substrate, and a second rotary driver mounted at a distal end of the swing arm and mounted to the substrate holder. Driving the first rotary driver during the pass includes: moving the swing arm in a first arcuate motion for a first portion of the pass when the local spot is located on the substrate; the swing arm is then moved in an opposite second arcuate motion for a second portion of the pass while the local spot is located on the substrate. 一种用于扫描衬底的方法包括：将衬底固定在加工室内的衬底固持器上；以及通过同步驱动第一旋转驱动器和第二旋转驱动器以使衬底相对于聚焦于衬底上的局部斑点上的加工设备运动来执行平行光栅图案的第一道次，第一旋转驱动器联接到摆臂的近端，并且第二旋转驱动器安装在摆臂的远端处并安装到衬底固持器。在该道次期间驱动第一旋