Chip etching machine

The invention relates to the technical field of chips, in particular to a chip etching machine which comprises an outer wrapping box, the front end of the outer wrapping box is open, two protective doors are rotatably connected to the front end of the outer wrapping box, a center box is fixedly conn...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHANG GUODONG, WANG ZHIHAO, LU JIATENG, GONG BO, ZHANG JINSHENG, TANG JIE
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The invention relates to the technical field of chips, in particular to a chip etching machine which comprises an outer wrapping box, the front end of the outer wrapping box is open, two protective doors are rotatably connected to the front end of the outer wrapping box, a center box is fixedly connected to the position, close to the bottom, of the inner side of the outer wrapping box, and an etching frame is arranged on the inner side of the outer wrapping box; the etching frame is located above the central box, two processing grooves used for etching and cleaning are formed in the top surface of the central box, spraying assemblies are arranged in the processing grooves, the spraying assemblies are used for spraying etching liquid and cleaning liquid to the surfaces of wafers, the etching frame is used for containing the wafers, a moving assembly is arranged on the outer side of the etching frame, and the moving assembly is used for moving the wafers. And the moving assembly is used for driving the etching