Multi-parameter coupled multi-pollutant distinguishing detection device and manufacturing method thereof

The invention provides a multi-parameter coupled multi-pollutant distinguishing detection device and a manufacturing method thereof. According to the device, a sensing unit is arranged in a microfluid chip, a thin steel sheet is arranged right opposite to a planar inductance coil, a detection channel is arranged between the thin steel sheet and the planar inductance coil, when oil liquid with various pollutants passes through the detection channel and the planar inductance coil induces pollutant particles, an inductance signal is output, and the pollutant particles are detected through the detection channel. Inductance parameter detection is realized; the planar inductance coil and the thin steel sheet form two electrode plates of the capacitor, when pollutant particles pass through the electrode plates, capacitance signals are output, and capacitance parameter detection is achieved. According to the difference of the inductance signal and the capacitance signal, pollutants such as ferromagnetic metal particl