Preparation method of flexible NO2 gas sensor and sensor

The invention relates to a preparation method of a flexible NO2 gas sensor and the sensor. The method comprises the following steps: step 1, preparing a MoS2/ZnS composite material by adopting a one-step hydrothermal method; 2, selecting a flexible substrate, and preparing an interdigital electrode...

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Hauptverfasser: SUN GUOPAN, NIU XIALU, CHENG PENGFEI, WANG YINGLIN, HAO XIDONG, WENG ZHI, CHEN SITIAN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention relates to a preparation method of a flexible NO2 gas sensor and the sensor. The method comprises the following steps: step 1, preparing a MoS2/ZnS composite material by adopting a one-step hydrothermal method; 2, selecting a flexible substrate, and preparing an interdigital electrode on the flexible substrate; and step 3, preparing a MoS2/ZnS composite film on the interdigital electrode by using the MoS2/ZnS composite material to obtain the NO2 gas sensor. According to the preparation method of the flexible NO2 gas sensor and the sensor, the NO2 gas sensor is prepared on the flexible substrate by using the MoS2/ZnS composite material as a sensitive material, and the flexible sensor has good stability and selectivity on NO2 at room temperature, is low in cost and small in size, and is beneficial to being integrated on wearable flexible equipment. 本发明涉及一种柔性NO2气体传感器的制备方法及传感器,该方法包括:步骤1:采用一步水热法制备得到MoS2/ZnS复合材料;步骤2:选取柔性衬底,在柔性衬底上制备叉指电极;步骤3:利用MoS2/ZnS复合材料,在叉指电极上制备MoS2/ZnS复合薄膜,得到NO2气体传感器。本发明的柔性NO2气体传感器的