Furnace body assembly, vapor deposition equipment and vapor deposition method

The invention relates to the technical field of vapor deposition, in particular to a furnace body assembly, vapor deposition equipment and a vapor deposition method, and aims to solve the problems that the vapor deposition equipment feeds workpieces into a hearth of a sub-furnace body through a mechanical arm, the structure is complex, the stability is poor when the workpieces are conveyed, and a large working space is needed. In the furnace body assembly, the first driving structure and the feeding platform can automatically convey the to-be-deposited piece, the first driving unit drives the first long gear to rotate, and the first long gear is meshed with the first gear assembly, so that the first gear assembly is driven to drive the first roller assembly to roll, and then the to-be-deposited piece is fed into the hearth; feeding is conducted in a gear transmission and roller rolling mode, the structure is simple and compact, reliability is high, and transmission is more stable, so that cached pieces to be