High-haze conductive film and single-process preparation method thereof

The invention relates to a high-haze conductive film and a single-process preparation method thereof. The single-process preparation method comprises the following steps: step S1, cleaning float high-transmittance glass by adopting an alkali liquor, an acid liquor or an ion beam etching method; s2,...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: WANG TIANQI, JIN KEWU, WANG DONG, YAO TINGTING, PENG SHOU, YANG YANG, LI GANG, WANG JINLEI, PENG SAIAO
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator WANG TIANQI
JIN KEWU
WANG DONG
YAO TINGTING
PENG SHOU
YANG YANG
LI GANG
WANG JINLEI
PENG SAIAO
description The invention relates to a high-haze conductive film and a single-process preparation method thereof. The single-process preparation method comprises the following steps: step S1, cleaning float high-transmittance glass by adopting an alkali liquor, an acid liquor or an ion beam etching method; s2, adopting a magnetron sputtering method, using a high-purity AZO target material, and preparing an AZO seed crystal in an air atmosphere with a certain concentration; s3, a sputtering power supply is turned off, high-vacuum air exhaust is carried out, and oxygen existing in the cavity is removed; s4, a magnetron sputtering method is adopted, a high-purity AZO target material is used, pre-sputtering is carried out in an oxygen-free environment, and then film coating is carried out; and S5, naturally cooling the coated glass to room temperature to obtain the high-haze AZO conductive film. The invention provides a simple and rapid process method for producing and manufacturing the high-haze AZO conductive film, and con
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN117702064A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN117702064A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN117702064A3</originalsourceid><addsrcrecordid>eNqNyjEOwiAUBmAWB6Pe4XkAklaNnU2jdnJyb17gbyGhPALo4OldPIDTt3xrdR_87LTjD8hItC9T_Rs0-bAQR0vFxzlApywGpVDKSJy5eom0oDqxVB0yZNqq1cShYPdzo_a367MfNJKMKIkNIurYP9q265pDcz5djv-cL33WNCs</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>High-haze conductive film and single-process preparation method thereof</title><source>esp@cenet</source><creator>WANG TIANQI ; JIN KEWU ; WANG DONG ; YAO TINGTING ; PENG SHOU ; YANG YANG ; LI GANG ; WANG JINLEI ; PENG SAIAO</creator><creatorcontrib>WANG TIANQI ; JIN KEWU ; WANG DONG ; YAO TINGTING ; PENG SHOU ; YANG YANG ; LI GANG ; WANG JINLEI ; PENG SAIAO</creatorcontrib><description>The invention relates to a high-haze conductive film and a single-process preparation method thereof. The single-process preparation method comprises the following steps: step S1, cleaning float high-transmittance glass by adopting an alkali liquor, an acid liquor or an ion beam etching method; s2, adopting a magnetron sputtering method, using a high-purity AZO target material, and preparing an AZO seed crystal in an air atmosphere with a certain concentration; s3, a sputtering power supply is turned off, high-vacuum air exhaust is carried out, and oxygen existing in the cavity is removed; s4, a magnetron sputtering method is adopted, a high-purity AZO target material is used, pre-sputtering is carried out in an oxygen-free environment, and then film coating is carried out; and S5, naturally cooling the coated glass to room temperature to obtain the high-haze AZO conductive film. The invention provides a simple and rapid process method for producing and manufacturing the high-haze AZO conductive film, and con</description><language>chi ; eng</language><subject>BASIC ELECTRIC ELEMENTS ; CABLES ; CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; CONDUCTORS ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; ELECTRICITY ; GLASS ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; INSULATORS ; JOINING GLASS TO GLASS OR OTHER MATERIALS ; METALLURGY ; MINERAL OR SLAG WOOL ; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES ; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS ; SURFACE TREATMENT OF GLASS ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20240315&amp;DB=EPODOC&amp;CC=CN&amp;NR=117702064A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20240315&amp;DB=EPODOC&amp;CC=CN&amp;NR=117702064A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>WANG TIANQI</creatorcontrib><creatorcontrib>JIN KEWU</creatorcontrib><creatorcontrib>WANG DONG</creatorcontrib><creatorcontrib>YAO TINGTING</creatorcontrib><creatorcontrib>PENG SHOU</creatorcontrib><creatorcontrib>YANG YANG</creatorcontrib><creatorcontrib>LI GANG</creatorcontrib><creatorcontrib>WANG JINLEI</creatorcontrib><creatorcontrib>PENG SAIAO</creatorcontrib><title>High-haze conductive film and single-process preparation method thereof</title><description>The invention relates to a high-haze conductive film and a single-process preparation method thereof. The single-process preparation method comprises the following steps: step S1, cleaning float high-transmittance glass by adopting an alkali liquor, an acid liquor or an ion beam etching method; s2, adopting a magnetron sputtering method, using a high-purity AZO target material, and preparing an AZO seed crystal in an air atmosphere with a certain concentration; s3, a sputtering power supply is turned off, high-vacuum air exhaust is carried out, and oxygen existing in the cavity is removed; s4, a magnetron sputtering method is adopted, a high-purity AZO target material is used, pre-sputtering is carried out in an oxygen-free environment, and then film coating is carried out; and S5, naturally cooling the coated glass to room temperature to obtain the high-haze AZO conductive film. The invention provides a simple and rapid process method for producing and manufacturing the high-haze AZO conductive film, and con</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CABLES</subject><subject>CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>CONDUCTORS</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRICITY</subject><subject>GLASS</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>INSULATORS</subject><subject>JOINING GLASS TO GLASS OR OTHER MATERIALS</subject><subject>METALLURGY</subject><subject>MINERAL OR SLAG WOOL</subject><subject>SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES</subject><subject>SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS</subject><subject>SURFACE TREATMENT OF GLASS</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyjEOwiAUBmAWB6Pe4XkAklaNnU2jdnJyb17gbyGhPALo4OldPIDTt3xrdR_87LTjD8hItC9T_Rs0-bAQR0vFxzlApywGpVDKSJy5eom0oDqxVB0yZNqq1cShYPdzo_a367MfNJKMKIkNIurYP9q265pDcz5djv-cL33WNCs</recordid><startdate>20240315</startdate><enddate>20240315</enddate><creator>WANG TIANQI</creator><creator>JIN KEWU</creator><creator>WANG DONG</creator><creator>YAO TINGTING</creator><creator>PENG SHOU</creator><creator>YANG YANG</creator><creator>LI GANG</creator><creator>WANG JINLEI</creator><creator>PENG SAIAO</creator><scope>EVB</scope></search><sort><creationdate>20240315</creationdate><title>High-haze conductive film and single-process preparation method thereof</title><author>WANG TIANQI ; JIN KEWU ; WANG DONG ; YAO TINGTING ; PENG SHOU ; YANG YANG ; LI GANG ; WANG JINLEI ; PENG SAIAO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN117702064A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2024</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CABLES</topic><topic>CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>CONDUCTORS</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRICITY</topic><topic>GLASS</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>INSULATORS</topic><topic>JOINING GLASS TO GLASS OR OTHER MATERIALS</topic><topic>METALLURGY</topic><topic>MINERAL OR SLAG WOOL</topic><topic>SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES</topic><topic>SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS</topic><topic>SURFACE TREATMENT OF GLASS</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>WANG TIANQI</creatorcontrib><creatorcontrib>JIN KEWU</creatorcontrib><creatorcontrib>WANG DONG</creatorcontrib><creatorcontrib>YAO TINGTING</creatorcontrib><creatorcontrib>PENG SHOU</creatorcontrib><creatorcontrib>YANG YANG</creatorcontrib><creatorcontrib>LI GANG</creatorcontrib><creatorcontrib>WANG JINLEI</creatorcontrib><creatorcontrib>PENG SAIAO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>WANG TIANQI</au><au>JIN KEWU</au><au>WANG DONG</au><au>YAO TINGTING</au><au>PENG SHOU</au><au>YANG YANG</au><au>LI GANG</au><au>WANG JINLEI</au><au>PENG SAIAO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>High-haze conductive film and single-process preparation method thereof</title><date>2024-03-15</date><risdate>2024</risdate><abstract>The invention relates to a high-haze conductive film and a single-process preparation method thereof. The single-process preparation method comprises the following steps: step S1, cleaning float high-transmittance glass by adopting an alkali liquor, an acid liquor or an ion beam etching method; s2, adopting a magnetron sputtering method, using a high-purity AZO target material, and preparing an AZO seed crystal in an air atmosphere with a certain concentration; s3, a sputtering power supply is turned off, high-vacuum air exhaust is carried out, and oxygen existing in the cavity is removed; s4, a magnetron sputtering method is adopted, a high-purity AZO target material is used, pre-sputtering is carried out in an oxygen-free environment, and then film coating is carried out; and S5, naturally cooling the coated glass to room temperature to obtain the high-haze AZO conductive film. The invention provides a simple and rapid process method for producing and manufacturing the high-haze AZO conductive film, and con</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language chi ; eng
recordid cdi_epo_espacenet_CN117702064A
source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
CABLES
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
CONDUCTORS
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRICITY
GLASS
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
INSULATORS
JOINING GLASS TO GLASS OR OTHER MATERIALS
METALLURGY
MINERAL OR SLAG WOOL
SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES
SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS
SURFACE TREATMENT OF GLASS
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
title High-haze conductive film and single-process preparation method thereof
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-23T16%3A33%3A02IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=WANG%20TIANQI&rft.date=2024-03-15&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN117702064A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true