Negative plate of ion source
The invention discloses an ion source negative plate, and relates to the technical field of mass spectrometer components, and the ion source negative plate comprises an ion source, the ion source is provided with a vacuum chamber, the vacuum chamber is provided with a laser, the laser is perpendicul...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses an ion source negative plate, and relates to the technical field of mass spectrometer components, and the ion source negative plate comprises an ion source, the ion source is provided with a vacuum chamber, the vacuum chamber is provided with a laser, the laser is perpendicular to the vacuum chamber, the vacuum chamber is provided with a through hole convenient for laser to pass through, and the through hole is provided with a light-transmitting sheet for sealing. The negative plate is located at the upper end of the vacuum cavity, a light reflecting piece is arranged in the vacuum cavity, the vacuum cavity is provided with a positioning piece used for supporting the light reflecting piece, the light reflecting piece is used for reflecting laser of the laser device to the negative plate, and a driving piece used for adjusting the reflection angle of the light reflecting piece is arranged at the lower end of the positioning piece. And a cleaning assembly for further cleaning the negativ |
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