Device for measuring liquid opening distance, liquid opening distance measuring method and single crystal furnace

The invention relates to a device for measuring the liquid opening distance, a liquid opening distance measuring method and a single crystal furnace, the device for measuring the liquid opening distance comprises a crucible containing a silicon solution and a heat shield arranged above the crucible,...

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Bibliographische Detailangaben
Hauptverfasser: GUO LI, DUAN LICHAO, KWAK WOO-RI, XIA CHAO, MO HUALONG, WANG JINGCHAO, YANG FUJUN, XIAO MING, HE FENG, WU KAI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention relates to a device for measuring the liquid opening distance, a liquid opening distance measuring method and a single crystal furnace, the device for measuring the liquid opening distance comprises a crucible containing a silicon solution and a heat shield arranged above the crucible, the lower surface of the heat shield is horizontally arranged, a groove is formed in the lower surface, and the heat shield is arranged above the crucible. The heat shield is provided with a groove, the groove and the outer contour of the lower surface are concentrically arranged, and the image acquisition device is arranged above the heat shield and used for picking up an image of an inverted image formed by the lower surface and the groove on the liquid level of the silicon solution. Through the technical scheme, the device for measuring the liquid port distance, the liquid port distance measuring method and the single crystal furnace provided by the invention can solve the technical problems that the inverted i