Process for preparing organotin compounds

The invention provides a simple method for preparing certain organotin compounds with alkyl and aryl substituents. These compounds are useful as intermediates in the synthesis of certain alkylamino-and alkoxy-substituted alkyltin compounds, which in turn are useful as precursors for the deposition of high purity tin oxide films in microelectronic device fabrication, such as extreme ultraviolet (EUV) lithography techniques. 本发明提供制备某些具有烷基和芳基取代基的有机锡化合物的简易方法。这些化合物可用作合成某些经烷胺基-和烷氧基-取代的烷基锡化合物的中间体，所述烷基锡化合物转而可用作在用于微电子装置制造的例如极端紫外光(EUV)光刻技术中沉积高纯度氧化锡膜的前体。