Semiconductor wafer turnover device
The invention discloses a semiconductor wafer turnover device, and relates to the technical field of semiconductor wafer turnover, the semiconductor wafer turnover device comprises a base, the top surface of the base is provided with a mounting rack, the back surface of the mounting rack is provided...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a semiconductor wafer turnover device, and relates to the technical field of semiconductor wafer turnover, the semiconductor wafer turnover device comprises a base, the top surface of the base is provided with a mounting rack, the back surface of the mounting rack is provided with a turnover assembly, the top surface of the mounting rack is provided with a protection assembly, and the top surface of the mounting rack is provided with an adjusting assembly. When a semiconductor wafer is clamped, the clamping arms can be driven to be folded through the first electric push rod, the semiconductor wafer is placed between the clamping arms and the clamping grooves, and then the gas conveying pipe is connected with an air compressor or other high-pressure gas conveying equipment, so that the gas conveying pipe can continuously convey high-pressure gas to the gas conveying cover; the flow rate can be controlled through the gas flow rate controller, and then the gas is discharged through the ga |
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