Supporting mechanism, supporting device and film preparation equipment

The invention relates to the technical field of thin film preparation, in particular to a supporting mechanism, a supporting device and thin film preparation equipment. The supporting mechanism comprises a long-strip-shaped supporting piece and a rotating assembly, the tubular structure of the base...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WAN QIANG, QIU LINPENG, LIAO JIAHAO, CHAI PAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of thin film preparation, in particular to a supporting mechanism, a supporting device and thin film preparation equipment. The supporting mechanism comprises a long-strip-shaped supporting piece and a rotating assembly, the tubular structure of the base body is arranged on the supporting piece in a sleeving mode, the rotating assembly drives the supporting piece to rotate around the first axis, and in the rotating process of the supporting piece, the initial surface, making contact with the base body, of the supporting piece can rotate relative to the supporting piece itself; under the action of the gravity of the base body and the friction force between the supporting piece and the inner wall of the tubular structure, the supporting piece can roll along the inner wall of the tubular structure relative to the base body, so that the contact position between the supporting piece and the base body is changed, the surface of the base body can be completely exposed in