Processing method and device, manufacturing system, data processing equipment and medium

The embodiment of the invention provides a processing method and device, a manufacturing system, data processing equipment and a medium, and the processing method comprises the steps: configuring a plurality of processing nodes according to a process executed by a wafer, and enabling different processing nodes in the plurality of processing nodes to output different processing step indication information; wherein the process step indication information output by the plurality of processing nodes is transmitted according to a set transmission path matched with the process; in response to the acquired processing instruction of the process, controlling the plurality of processing nodes to output and transmit process step indication information according to a set transmission path matched with the process; and monitoring whether the process step indication information is correctly transmitted according to the set transmission path or not, and determining whether to generate a processing control signal for executi