Electromigration process simulation method and system combined with atom evolution information and electronic equipment

The invention discloses an electro-migration process simulation method and system combined with atom evolution information and electronic equipment, and aims to overcome the defect that a traditional simulation method is difficult to describe cavity growth and expansion phenomena in electro-migratio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YUAN JINGYI, SONG ZIXIAN, LUO WEI, ZHU YIYING, SHANG TENGFEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTEDFOR SPECIFIC APPLICATION FIELDS PHYSICS
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