Transport system, lithographic apparatus, and article manufacturing method

The invention relates to a transport system, a lithographic apparatus, and a method of manufacturing an article. The present invention is provided with: a storage unit for storing first information relating to the position of an object in a storage container among a plurality of objects; an informat...

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Hauptverfasser: MOTEGI YASUHIRO, ISHIKAWA ISAMU, IWAIZUMI TOMOHIRO, YAZAWA YASUHIRO
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention relates to a transport system, a lithographic apparatus, and a method of manufacturing an article. The present invention is provided with: a storage unit for storing first information relating to the position of an object in a storage container among a plurality of objects; an information generation unit that generates second information relating to the position of a first object in the storage container on the basis of information relating to the driving of a robot that transports the first object outside the storage container among the plurality of objects into the storage container; and an information updating unit that updates the first information on the basis of the second information. 本发明涉及输送系统、光刻装置以及物品的制造方法。具备:存储部,存储与多个物体中的处于储存容器内的物体的位置相关的第1信息;信息生成部,基于与将所述多个物体中的处于所述储存容器外的第1物体向所述储存容器内输送的机械手的驱动相关的信息,生成与所述储存容器内的所述第1物体的位置相关的第2信息;以及信息更新部,基于所述第2信息更新所述第1信息。