Production device and method of electronic-grade silicon tetrachloride

The invention provides a production device and method of electronic grade silicon tetrachloride, comprising a pipeline mixer used for premixing chlorine and silicon tetrachloride raw materials in the pipeline mixer, a rectifying tower comprising a tower top outlet, a tower kettle outlet, and a feed...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG LEI, ZHAO XIONG, ZHANG XINGYI, ZHANG YANNAN, GUO SHUHU, GUO KETAO, WAN YE, ZHAO YU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION THEIR RELEVANT APPARATUS TRANSPORTING
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