Production device and method of electronic-grade silicon tetrachloride

The invention provides a production device and method of electronic grade silicon tetrachloride, comprising a pipeline mixer used for premixing chlorine and silicon tetrachloride raw materials in the pipeline mixer, a rectifying tower comprising a tower top outlet, a tower kettle outlet, and a feed...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG LEI, ZHAO XIONG, ZHANG XINGYI, ZHANG YANNAN, GUO SHUHU, GUO KETAO, WAN YE, ZHAO YU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a production device and method of electronic grade silicon tetrachloride, comprising a pipeline mixer used for premixing chlorine and silicon tetrachloride raw materials in the pipeline mixer, a rectifying tower comprising a tower top outlet, a tower kettle outlet, and a feed inlet, a reflux inlet and a product outlet arranged between the tower top outlet and the tower kettle outlet, a feed port of the rectifying tower is communicated with an outlet of the pipeline mixer, a tower top outlet of the rectifying tower is communicated with the reflux tank through a tower top condenser and a liquid discharging pipeline, and an outlet of the reflux tank is communicated with the reflux port through a discharging pipeline; the photochlorination device comprises a plurality of sight glasses arranged on the liquid discharging pipeline and/or the discharging pipeline and an ultraviolet light source arranged on one side of the exterior of the sight glasses. According to the scheme, the photochlorina