Production device and method of electronic-grade silicon tetrachloride
The invention provides a production device and method of electronic grade silicon tetrachloride, comprising a pipeline mixer used for premixing chlorine and silicon tetrachloride raw materials in the pipeline mixer, a rectifying tower comprising a tower top outlet, a tower kettle outlet, and a feed...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a production device and method of electronic grade silicon tetrachloride, comprising a pipeline mixer used for premixing chlorine and silicon tetrachloride raw materials in the pipeline mixer, a rectifying tower comprising a tower top outlet, a tower kettle outlet, and a feed inlet, a reflux inlet and a product outlet arranged between the tower top outlet and the tower kettle outlet, a feed port of the rectifying tower is communicated with an outlet of the pipeline mixer, a tower top outlet of the rectifying tower is communicated with the reflux tank through a tower top condenser and a liquid discharging pipeline, and an outlet of the reflux tank is communicated with the reflux port through a discharging pipeline; the photochlorination device comprises a plurality of sight glasses arranged on the liquid discharging pipeline and/or the discharging pipeline and an ultraviolet light source arranged on one side of the exterior of the sight glasses. According to the scheme, the photochlorina |
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