Relaxation ferroelectric single crystal electrode and preparation method thereof
The invention provides a relaxor ferroelectric single-crystal electrode and a preparation method thereof, and the preparation method comprises the steps: preparing an abrasive aqueous solution, and carrying out sand blasting treatment on a relaxor ferroelectric single-crystal wafer to obtain the rel...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a relaxor ferroelectric single-crystal electrode and a preparation method thereof, and the preparation method comprises the steps: preparing an abrasive aqueous solution, and carrying out sand blasting treatment on a relaxor ferroelectric single-crystal wafer to obtain the relaxor ferroelectric single-crystal wafer after sand blasting treatment; sputtering transition metal on the relaxor ferroelectric single crystal wafer subjected to sand blasting treatment in a protective gas environment with the vacuum degree of 1 * 10 to 1 * 10 Pa by adopting an ion sputtering method to prepare a transition metal layer; and sputtering noble metal on the transition metal layer by adopting an ion sputtering method in a protective gas environment with the vacuum degree of 1 * 10 -1 * 10 Pa, and preparing a noble metal layer to obtain the relaxor ferroelectric single crystal electrode. According to the relaxor ferroelectric single-crystal electrode provided by the invention, the p |
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