Relaxation ferroelectric single crystal electrode and preparation method thereof

The invention provides a relaxor ferroelectric single-crystal electrode and a preparation method thereof, and the preparation method comprises the steps: preparing an abrasive aqueous solution, and carrying out sand blasting treatment on a relaxor ferroelectric single-crystal wafer to obtain the rel...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: LI HUI, ZHENG YU, TONG YAQI, ZHANG WEI, WANG ZHEN
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention provides a relaxor ferroelectric single-crystal electrode and a preparation method thereof, and the preparation method comprises the steps: preparing an abrasive aqueous solution, and carrying out sand blasting treatment on a relaxor ferroelectric single-crystal wafer to obtain the relaxor ferroelectric single-crystal wafer after sand blasting treatment; sputtering transition metal on the relaxor ferroelectric single crystal wafer subjected to sand blasting treatment in a protective gas environment with the vacuum degree of 1 * 10 to 1 * 10 Pa by adopting an ion sputtering method to prepare a transition metal layer; and sputtering noble metal on the transition metal layer by adopting an ion sputtering method in a protective gas environment with the vacuum degree of 1 * 10 -1 * 10 Pa, and preparing a noble metal layer to obtain the relaxor ferroelectric single crystal electrode. According to the relaxor ferroelectric single-crystal electrode provided by the invention, the p