Silicon heterojunction solar cell and preparation method thereof

The invention provides a silicon heterojunction solar cell and a preparation method thereof. The solar cell is a silicon heterojunction solar cell based on selective contact of oxide and silicon film double-layer carriers. According to the method, the element proportion is regulated and controlled, and an oxide and a doped silicon thin film are introduced to serve as a double-layer carrier selective contact material. According to the method, on one hand, an undoped and wide-band-gap carrier selection material is adopted, low optical loss is caused, and the optical performance of the cell is improved; and on the other hand, the oxide carrier transport layer and the doped silicon thin film can form a gradient field effect passivation structure, so that the carrier selectivity is improved, the crystallization of the transparent conductive oxide thin film is promoted, and the electrical property of the cell is improved. 本发明提出一种硅异质结太阳电池及其制备方法，该太阳电池为基于氧化物和硅薄膜双层载流子选择性接触的硅异质结太阳电池。该方法通过调控元素比例，并引入了氧化物与掺杂硅薄膜作为双层载流子选择性接触