Sample assembly preparation method suitable for TOF-SIMS and sample assembly

The invention provides a sample assembly preparation method suitable for TOF-SIMS, and the method comprises the steps: arranging a to-be-treated sample at one side of a sample loading plate, the to-be-treated sample comprising a protruding part extending out of the edge of the sample loading plate; a polishing baffle is arranged on the side, away from the sample loading plate, of the to-be-treated sample, part of the protruding part extends out of the edge of the polishing baffle, and a to-be-treated sample assembly is obtained; the part, extending out of the edge of the polishing baffle, of the protruding part is ground through an ion beam, so that a polishing section flush with the polishing baffle is formed on the to-be-treated sample, the polishing baffle is removed, and the sample assembly is obtained. The surface of the sample treated by the preparation method provided by the invention is clean and pollution-free, and the sample loading plate in the sample can provide auxiliary support and stability for