Chromium-plated pressure sensor

The invention provides a chromium-plated pressure sensor, which comprises two membrane seat assemblies which are arranged oppositely, the two membrane seat assemblies are buckled with each other, an induction cavity is formed between the two membrane seat assemblies, a central membrane is arranged b...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG WEI, XI WEIJUN, WU XUEQIONG, HUANG JIGANG, WEN YIKAI, XIAO XIANG, CHEN YANHUI, YU LICHUAN, QI JIAJIE, WANG SHENGGUANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a chromium-plated pressure sensor, which comprises two membrane seat assemblies which are arranged oppositely, the two membrane seat assemblies are buckled with each other, an induction cavity is formed between the two membrane seat assemblies, a central membrane is arranged between the two membrane seat assemblies, the central membrane divides the induction cavity into two identical filling cavities, and the two filling cavities are communicated with each other. A filling cavity is formed in the center diaphragm, glass and a chromium plating layer are further sequentially arranged on the side face, facing the center diaphragm, of the diaphragm base assembly, the chromium plating layer covers the surface of the glass and makes contact with the filling cavity, a guide pipe is further arranged on the diaphragm base assembly, and the guide pipe is used for filling the filling cavity with silicone oil. High-purity chromium is adopted as a capacitor plate coating material on the glass, the t